| Home | E-Submission | Sitemap | Contact Us |  
top_img
J Radiat Prot > Volume 28(2); 2003 > Article
Journal of Radiation Protection 2003;28(2):87-0.
개인 선량 측정용 PIN 반도체 검출기 개발에 관한 연구
이봉재;이완로;강병위;장시영;노승용;채현식;
A Study on Development of a PIN Semiconductor Detector for Measuring Individual Dose
Lee, B.J.;Lee, W.N.;Khang, B.O.;Chang, S.Y.;Rho, S.R.;Chae, H.S.;
ABSTRACT
The fabrication process and the structure of PIN semiconductor detectors have been designed optimally by simulation for doping concentration and width of p+ layer, impurities re-contribution due to annealing and the current distribution due to guard ring at the sliced edges. The characteristics to radiation response has been also simulated in terms of Monte Carlo Method. The device has been fabricated on n type, $400;{Omega}cm$, orientation <100>, Floating-Zone silicon wafer using the simulation results. The leakage current density of $0.7nA/cm^2/100{mu}m$ is achieved by this process. The good linearity of radiation response to Cs-137 was kept within the exposure ranges between 5 mR/h and 25 R/h. This proposed process could be applied for fabricating a PIN semiconductor detector for measuring individual dose.
Editorial Office
#319, Hanyang Institute of Technology Bldg., 222 Wangsimni-ro, Seongdong-gu,Seoul, Republic of Korea
Tel: +82-2-2297-9775   Fax: +82-2-2297-9776
Email: jrpr.editorial@gmail.com
About |  Browse Articles |  Current Issue |  For Authors and Reviewers
Copyright © by Korean Association for Radiation Protection. Developed in M2PI